Micro- and Nano-scale Surface and Interface Engineering: Synthesis, Characterization, and Applications addresses the challenges of micro- and nano-scale surface and interface engineering by providing a comprehensive exploration of surface design, texture, porous structure, surface reaction, degradation, and surface strengthening processes. It offers solutions for understanding interface reactions of materials, particularly in the context of micro-electromechanical systems (MEMS), biomaterials surfaces, self-cleaning structures, and surface modeling and characterization. The content extends to practical applications across diverse sectors, including microelectronics and nanoelectronics, microfluidics and lab-on-a-chip systems, nanomanufacturing, and nanofabrication. The focus lies on the scientific principles underpinning surface and interface engineering at the micro- and nano-scale, incorporating various surface modification techniques utilizing a spectrum of materials, ranging from traditional structural materials to advanced smart materials.
